Lambda Physik
Lambda Physik was a German manufacturer and pioneer in excimer laser technology, particularly known for developing high-performance ultraviolet laser systems for industrial, scientific, medical, and semiconductor applications. Its excimer lasers, including KrF (248 nm) and ArF (193 nm) systems, were widely used for applications such as photolithography, micromachining, materials processing, and research. The company became an important name in the development of commercial pulsed UV laser technology and was subsequently incorporated into the Coherent group.
| Laser series | Example models | Typical application |
|---|---|---|
| NovaLine | A2005, K2005 | Semiconductor photolithography |
| COMPex | COMPex 100, 150, 200, 201, 205, 301 | Scientific research, laser ablation, materials processing |
| LPX | LPX 100, 110, 205, 210, 220, 301, 305 | Industrial processing and scientific applications |
| LPXpro | LPXpro 210, 220, 240, 305 | Industrial materials processing |
| LPF | LPF 202, 210, 220 | Industrial and specialized laser processing |
| Lambda STEEL | STEEL 600K, 670, 1000 | High-power processing and excimer laser annealing |
| OPT ex / OPTex | OPTex 100, 150, 200 series | Compact excimer laser applications |
| OPT exPro | ArF, KrF, XeF, XeCl and F₂ versions | Compact UV laser applications; discontinued product family |
| EMG | EMG-101, EMG-102E, EMG-103E, EMG-203-MSC | Scientific and research applications |
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