Coherent ExciStar
The Coherent ExciStar is a pulsed excimer laser system designed for precision ultraviolet laser applications. It is available in 193 nm (ArF) and 248 nm (KrF) configurations and uses short-duration, high-energy pulses to provide precise material ablation. The ExciStar range includes different repetition-rate models, making it suitable for applications such as ophthalmic refractive surgery, microfabrication and scientific research.
Core Specifications
| Specification | ExciStar 200 | ExciStar 500 | ExciStar 1000 |
|---|---|---|---|
| Laser type | Excimer | Excimer | Excimer |
| 193 nm medium | ArF | ArF | ArF |
| 248 nm medium | KrF | KrF | KrF |
| Maximum repetition rate | 200 Hz | 500 Hz | 1,000 Hz |
| Nominal pulse energy — 193 nm | 5 mJ | 5 mJ | 5 mJ |
| Nominal pulse energy — 248 nm | 10 mJ | 10 mJ | 10 mJ |
| Maximum pulse energy — 193 nm | 12 mJ | 12 mJ | 12 mJ |
| Maximum pulse energy — 248 nm | 16 mJ | 16 mJ | 16 mJ |
| Nominal power — 193 nm | 1 W | 2.5 W | 5 W |
| Nominal power — 248 nm | 2 W | 5 W | 10 W |
| Pulse duration — 193 nm | 7 ± 2 ns | 7 ± 2 ns | 7 ± 2 ns |
| Pulse duration — 248 nm | 10 ± 3 ns | 10 ± 3 ns | 10 ± 3 ns |
| Beam dimension — 193 nm | 5.8 ± 0.5 × 2.6 ± 0.5 mm | Same | Same |
| Beam dimension — 248 nm | 5.6 ± 0.5 × 2.6 ± 0.5 mm | Same | Same |
| Energy stability | <2% σ | — | — |
| Cooling | Air | Air | Air |
| Electrical supply | 230 V, 50/60 Hz, single phase | Same | Same |
| Dimensions | 649 × 299 × 401.5 mm | — | — |
| Weight | 66 kg | — | — |
General Characteristics
- Manufacturer: Coherent
- Product: ExciStar
- Configuration: Tabletop excimer laser
- Wavelengths: 193 nm / 248 nm
- Technology: Pulsed gas-discharge excimer laser
- Laser gas: ArF for 193 nm; KrF for 248 nm
- Repetition rates: 200, 500 or 1,000 Hz
- Pulse duration: approximately 7 ns at 193 nm and 10 ns at 248 nm
- Cooling: Air-cooled
- Power: Up to 10 W at 248 nm
- Beam delivery: UV output beam for integration into an optical system
- Gas system: Premixed gas supply
- Laser tube: Coherent ALMETA tube design
- Applications: corneal ablation/LASIK, precision marking, optical sensor manufacture, LA-ICP-MS and fibre Bragg grating writing.
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