Coherent COMPex
The Coherent COMPex is a high-energy pulsed excimer laser system designed for precision ultraviolet laser processing. It is available in several wavelengths, including 157, 193, 248, 308 and 351 nm, depending on the model. The COMPex range provides high pulse energy and stable beam performance for applications such as material processing, laser lift-off, thin-film processing and scientific research.
General Specifications
| Parameter | Specification |
|---|---|
| Manufacturer | Coherent |
| Product family | COMPex excimer lasers |
| Laser type | Pulsed excimer laser |
| Available wavelengths | 157, 193, 248, 308 and 351 nm |
| Laser class | Class 4 |
| Maximum pulse energy | Up to 750 mJ |
| Maximum repetition rate | Up to 100 Hz |
| Pulse duration, typical | 20 ns FWHM |
| Energy stability | ≤0.75% RMS (1σ) |
| Beam pointing stability | ≤50 µrad (1σ) |
| Cooling | Water cooling required above 20 Hz |
| Electrical supply | 200–240 VAC, 16 A, 50/60 Hz, single phase; or 100–120 VAC, 25 A, 50/60 Hz, single phase |
| Expected laser lifetime | Approximately 10 years |
| Typical applications | PLD, laser lift-off/debonding, thin-wafer processing, LA-ICP-MS, FBG writing and precision material processing |
Model specifications
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Model Wavelength Max. pulse energy Max. repetition rate Max. average power COMPex F2 157 nm 32 mJ 50 Hz 1.6 W COMPex 50 193 nm 100 mJ 50 Hz 4 W COMPex 102 193 nm 240 mJ 20 Hz 4.8 W COMPex 110 193 nm 240 mJ 100 Hz 12 W COMPex 201 193 nm 400 mJ 10 Hz 4 W COMPex 205 193 nm 400 mJ 50 Hz 15 W COMPex F2 193 nm 400 mJ 50 Hz 15 W COMPex 50 FBG 248 nm 140 mJ 100 Hz 12 W COMPex 50 248 nm 150 mJ 50 Hz 7 W COMPex 102 248 nm 400 mJ 20 Hz 8 W COMPex 110 248 nm 400 mJ 100 Hz 30 W COMPex 201 248 nm 750 mJ 10 Hz 7.5 W COMPex 205 248 nm 750 mJ 50 Hz 33 W COMPex 102 308 nm 250 mJ 20 Hz 5 W COMPex 110 308 nm 250 mJ 100 Hz 16 W COMPex 201 308 nm 500 mJ 10 Hz 5 W COMPex 205 308 nm 500 mJ 50 Hz 20 W COMPex 102 351 nm 200 mJ 20 Hz 4 W COMPex 110 351 nm 200 mJ 100 Hz 12 W COMPex 201 351 nm 300 mJ 10 Hz 3 W COMPex 205 351 nm 300 mJ 50 Hz 15 W
Beam specifications
| Model | Beam dimensions, V × H | Beam divergence, V × H |
|---|---|---|
| COMPex FBG | 12 × 4.5 mm | 0.3 × 0.2 mrad |
| COMPex 50 | 14 × 5 mm | 2 × 1 mrad |
| COMPex 102 | 24 × 10 mm | 3 × 1 mrad |
| COMPex 110 | 24 × 10 mm | 3 × 1 mrad |
| COMPex 201 | 24 × 10 mm | 3 × 1 mrad |
| COMPex 205 | 24 × 10 mm | 3 × 1 mrad |
| COMPex F2 | 22 × 8 mm | 3 × 1 mrad |
Mechanical specifications
| Parameter | Specification |
|---|---|
| Dimensions | 1258 × 375 × 813 mm or 1658 × 375 × 813 mm |
| Approx. dimensions | 50 × 15 × 32 in or 66 × 15 × 32 in |
| Weight | Approximately 280 kg or 325 kg |
| Cooling-water flow | ≤5 L/min |
| Cooling-water temperature | 10–20 °C |
| Water connection | ½ inch |
| Electrical configuration | Single phase |
Radiation safety specifications
For installation and laser-safety purposes, Coherent’s current pre-installation documentation specifies:
- Laser classification: Class 4
- Maximum average power: 50 W
- Maximum output per pulse: 0.7 J for COMPex 50/50 FBG/102/110/F2; 1.0 J for COMPex 201/205
- Pulse duration range: 10–50 ns
- Emitted wavelength range: 193–351 nm for most models
- COMPex F2: 157–193 nm, with associated visible emission in the 620–800 nm range.
Note: These are laser-safety limits, not necessarily the normal operating output of each model. The actual operating specification should be taken from the individual laser’s nameplate and configuration.
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